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Thin Wafer Dicing: Results
        
XSiL laser cutting systems are specialized in dicing thin silicon wafers (see X300D and X300D+).  
      
      
ParametersResults for 50µm Si wafers
Machining SpeedFrom 200mm/s up to 300mm/s
Kerf Width~24 microns average
Mean Die Strength (after MaxFlex)>1100MPa
      
XSiL’s laser dicing system is able to machine thin silicon and die-attach film (DAF) with minimal damage and no chipping.
      
SIlicon wafer (50 microns)Silicon wafer (75 microns)
      
Blank silicon wafers diced with the X300D+ (left: 50um; right: 75um)
85um silicon wafer before MaxFlex85um silicon wafer after MaxFlex
      
      
      
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Dicing Systems
        
Download Application Note on Thin Wafer Dicing
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
        
XSiL Ltd, Silverstone House, Ballymoss Road, Sandyford, Dublin 18, Ireland
xm-08-006.0    |    Phone: +353 1 245 7500    |    Fax: +353 1 245 7501    |    Email: info@xsil.com    |    Powered by: go2web